HOME > 제품소개

 
 
       
 
 

Gen5 Split XY Stage는 최대 300 Kg의 부하조건에서 사용이 가능하며, 정속특성 및 정지시 위치 안정성이 우수하여 정밀검사장비에 사용이 가능합니다.

- Travel: 2,200(X) x 1.200(Y) mm
- Repeatability: ± 1 μm
- Maximum Velocity: up to 1,000 mm/sec.
- Pay Load: up to 300 Kg (X Axis)
- Non-contact linear servo motor and encoder
 
 
Performance Parameter Performance Specification (Mechanical Bearing Type)
Axis unit X Axis (Lower) Y Axis (Bridge)
Travel mm 2,200 mm 1,200 mm
Pay Load kg 300 (@ X slide) 30 (@ Y slide)
Resolution(1) nm Less than 5 nm/count
Mean Positioning Accuracy(2) μm ± 2 μm/ full travel
Bi-directional Repeatability μm ± 1 μm/ full travel
Flatness (full travel) μm ± 8 ± 5
Straightness (full travel) μm ± 8 ± 5
Pitch (full travel) arc-sec ± 7 ± 5
Yaw (full travel) arc-sec ± 7 ± 5
Maximum Velocity mm/sec 1,000
Maximum Acceleration G 0.3
In-Position Stability μm Less than ± 0.05
Velocity Ripple % ± 0.2% (@ 300 mm/sec) N/A
Orthogonality arc-sec ± 5 (X to Y)
Clean Room Criteria class 100
Note : 1.?Resolution includes 4 x multiplications at controller.
  2. After error mapping condition.
  *. Soonhan offers higher performance, change of travel and adds options by requested.
  * All specifications are per axis base, tested under the payload for each axis, fully supported.
 
 
 
- -