HOME > 제품소개

 
 
 
 

Gen7 Air Bearing Stage는 중 하중 부하 조건에서 사용할 수 있으며, 양측식 리니어 서보 모터로 구동되는 정밀 위치제어용 에어베어링 스테이지이며, 최대 500 mm/sec 속도까지 가능하고 정속 특성이 매우 우수하여 Scanning 및 고정밀도를 요구하는 핵심적인 정밀검사 장비에 적합 합니다.

- Travel: 2,900 mm (Lower Axis)
- Repeatability: ± 0.5μm
- Maximum Velocity: up to 500 mm/sec.
- Pay Load: up to 300 Kg (X Axis)
- Non-contact linear servo motor and encoder
- Hign stiffness air bearing guide way
 
Performance Parameter Performance Specification (Mechanical Bearing Type)
Axis unit X Axis (Lower) Y Axis (Bridge)
Travel mm 2,900 mm 2,100 mm
Pay Load kg 300 30
Resolution(1) nm Less than 5 nm/count
Mean Positioning Accuracy(2) μm ± 3 μm/ 1,000 mm
Bi-directional Repeatability μm ± 0.5 μm ± 10 μm
Flatness (full travel) μm ± 7 ± 10
Straightness (full travel) μm ± 5 ± 8
Pitch (full travel) arc-sec ± 6 ± 10
Yaw (full travel) arc-sec ± 5 ± 7
Maximum Velocity mm/sec 500
Maximum Acceleration G 0.2 0.3
In-Position Stability μm Less than ± 0.1
Velocity Ripple % ± 0.05 N/A
Orthogonality arc-sec ± 5
Clean Room Criteria class 100
Note : 1.?Resolution includes 4 x multiplications at controller.
  2. After error mapping condition.
  *. Soonhan offers higher performance, change of travel and adds options by requested.
  * All specifications are per axis base, tested under the payload for each axis, fully supported.
 
 
 
- -