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- Compact and Multiple Slide Stage
-Travel: 60 mm
- Repeatability: ± 1 μm
- Pay Load: up to 10 Kg
- Non-contact linear servo motor and encoder
 
 
-'Heavy weight' Precision Linear Motor Stage
- Repeatability: ± 1 μm
- Maximum Velocit: 2,000 mm/second
- Non-contact linear servo motor and encoder
 
 
 
- Base part is 'Separable' structure
- Multiple slides
- Stage length is an unlimited
- Repeatability: ± 2 μm
- Non-contact linear servo motor and encoder
 
 
- Travel: up to 3,000 mm
- Repeatability: ± 1 μm
- Maximum Velocit: 2,000 mm/second
- Non-contact linear servo motor and encoder
 
 
  .
- Travel: up to 2,000 mm
- Repeatability: ± 0.5 μm
- Maximum Velocity: up to 1,000 mm/sec
- Velocity Ripple: less than ± 0.1%
- Non-contact linear servo motor and encoder
 
  .
- Maximum Travel: up to 50 mm
- Repeatability: ± 0.5 μm
- Rotary AC Servo Motor or Rotary Stepping Motor
 
 
 
 
- Travel: 550(L) x 350(U) (Stacked XY Type)
- Repeatability: ± 0.1 μm
- Maximum Velocity: up to 500 mm/sec
- Enviroment of Vaccum: up to 10 -7 Torr
- In Position Stability: less than ± 10 nm
 
 
- Travel: 350(L) x 400(U) mm
- Repeatability: ± 0.5 μm
- Maximum Velocity: up to 500 mm/sec
- Non-contact linear servo motor and encoder
- In Position Stability: less than ± 30 nm
 
 
- Travel: 1.000(L) x 2,200(U) mm
- Repeatability: ± 1.5 μm
- Maximum Velocity: up to 2,000 mm/second
- Pay Load: up to 150 Kg
- Non-contact linear servo motor and encoder
 
 
-'Wide & High Stiffness' aluminum base (Lower)
- High Stiffness' Beam Type Stage (Upper)
- Repeatability: ± 1 μm
- Pay Load: up to 100 Kg
- Non-contact linear servo motor and encoder
 
 
- Travel: less than ± 3 degree
- Repeatability: ± 1 arc-sec
- Fast response rotary AC servo motor and ball screw drive
- Non-contact linear servo motor and encoder
 
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